Researchers have reverse-engineered a piece of malware named Fast16. It’s almost certainly state-sponsored, probably US in origin, and was deployed against Iran years before Stuxnet:

“…the Fast16 malware was designed to carry out the most subtle form of sabotage ever seen in an in-the-wild malware tool: By automatically spreading across networks and then silently manipulating computation processes in certain software applications that perform high-precision mathematical calculations and simulate physical phenomena, Fast16 can alter the results of those programs to cause failures that range from faulty research results to catastrophic damage to real-world equipment.”

Another news article.

Lots of interesting details at the links.